VLSI electronics : microstructure science /

Bibliographic Details
Other Authors: Einspruch, Norman G.
Format: Book
Language:English
Published: New York : Academic Press, 1981.
Subjects:
Table of Contents:
  • v. 1-5. [without special titles]
  • v. 6. Materials and process characterization
  • v. 7. [without special title]
  • v. 8. Plasma processing for VLSI
  • v. 9. [without special title]
  • v. 10. Surface and interface effects in VLSI
  • v. 11. GaAs microelectronics
  • v. 12. Silicon materials
  • v. 13. Metal-semiconductor contacts and devices
  • -- v. 14. VLSI design
  • v. 15. VLSI metallization
  • v.16. Lithography for VLSI-- v. 17. VLSI in medicine
  • v. 19. Advanced CMOS processtechnology
  • v. 20. VLSI and computer architecture
  • v. 23. Application specific integrated circuit (ASIC) technology
  • v. 24. Heterostructures and quantum devices.