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|a 0122341015 (v. 1 : alk. paper)
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|a 621.395 s
|2 19
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| 245 |
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|a VLSI electronics :
|b microstructure science /
|c edited by Norman G. Einspruch.
|
| 264 |
|
1 |
|a New York :
|b Academic Press,
|c 1981.
|
| 300 |
|
|
|a 24 volumes :
|b illustrations ;
|c 24 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
|
|a volume
|b nc
|2 rdacarrier
|
| 500 |
|
|
|a Volumes 11- have imprint: Orlando : Academic Press; volume 19- : San Diego : Academic Press.
|
| 500 |
|
|
|a Volume 6 edited by Norman G. Einspruch, Graydon B. Larrabee; volume 11 edited by Norman G. Einspruch, William R. Wisseman; volume 12 edited by Norman G. Einspruch, Howard Huff; volume 15 edited by Norman G. Einspruch, Simon S. Cohen, Gennady Sh. Gildenblat; volume 16 edited by Norman G. Einspruch, R.K. Watts.
|
| 504 |
|
|
|a Includes bibliographies and indexes.
|
| 505 |
1 |
|
|a v. 1-5. [without special titles] -- v. 6. Materials and process characterization -- v. 7. [without special title] -- v. 8. Plasma processing for VLSI -- v. 9. [without special title] -- v. 10. Surface and interface effects in VLSI -- v. 11. GaAs microelectronics -- v. 12. Silicon materials -- v. 13. Metal-semiconductor contacts and devices
|
| 505 |
0 |
|
|a -- v. 14. VLSI design -- v. 15. VLSI metallization -- v.16. Lithography for VLSI-- v. 17. VLSI in medicine -- v. 19. Advanced CMOS processtechnology -- v. 20. VLSI and computer architecture -- v. 23. Application specific integrated circuit (ASIC) technology -- v. 24. Heterostructures and quantum devices.
|
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|a Integrated circuits
|x Very large scale integration.
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|a Einspruch, Norman G.
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