| Tag |
First Indicator |
Second Indicator |
Subfields |
| LEADER |
00000cam a2200000 a 4500 |
| 001 |
in00000082786 |
| 005 |
20151008054227.0 |
| 008 |
811204s1981 waua b 10100 eng |
| 010 |
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|a 81051405
|
| 020 |
|
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|a 0892523085 (pbk.)
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|a (OCoLC)07654491
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| 050 |
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|a TK7871.85
|b .S466
|
| 082 |
0 |
|
|a 621.381/73
|2 19
|
| 245 |
0 |
0 |
|a Semiconductor microlithography VI :
|b March 30-31, 1981, San Jose, California /
|c Jim Dey, editor.
|
| 264 |
|
1 |
|a Bellingham, Wash. :
|b SPIE--The International Society for Optical Engineering,
|c [1981]
|
| 264 |
|
4 |
|c ©1981
|
| 300 |
|
|
|a vi, 221 pages :
|b illustrations ;
|c 28 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
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|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Proceedings of SPIE--The International Society for Optical Engineering ;
|v v. 275
|
| 504 |
|
|
|a Includes bibliographical references and indexes.
|
| 650 |
|
0 |
|a Semiconductors
|v Congresses.
|
| 650 |
|
0 |
|a Microelectronics
|v Congresses.
|
| 650 |
|
0 |
|a Photolithography
|x Congresses.
|
| 700 |
1 |
|
|a Dey, Jim.
|
| 710 |
2 |
|
|a Society of Photo-optical Instrumentation Engineers.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 275.
|
| 999 |
|
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|a MARS
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| 952 |
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|p ric
|a Texas A&M University
|b Rellis Campus
|c Joint Library Facility
|d Remote Storage
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|e TK7871.85 .S466
|h Library of Congress classification
|i unmediated -- volume
|m A14806252042
|
| 998 |
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|a TK7871.85 .S466
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