Cover Image

Semiconductor microlithography VI : March 30-31, 1981, San Jose, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Dey, Jim
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE--The International Society for Optical Engineering, [1981]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 275.
Subjects:
Semiconductors > Congresses.
Microelectronics > Congresses.
Photolithography > Congresses.
Description
Physical Description:vi, 221 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0892523085 (pbk.)