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Electron and ion optics /

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Bibliographic Details
Main Author: Szilágyi, Miklós
Format: Book
Language:English
Published: New York : Plenum Press, [1988]
Series:Microdevices.
Subjects:
Electron optics.
Electron beams.
Ion bombardment.
Electromagnetic lenses.
Description
Item Description:Includes index.
Physical Description:xvi, 539 pages : illustrations ; 26 cm.
Bibliography:Bibliography: pages 515-528.
ISBN:0306427176