Processing of electronic materials : proceedings of the First International Conference held at Santa Barbara, California, USA, February 23-28, 1987 /

Bibliographic Details
Corporate Authors: International Conference on Processing of Electronic Materials Santa Barbara, Cal, Engineering Foundation (U.S.), National Science Foundation (U.S.)
Other Authors: Law, Clarence G., Pollard, Richard
Format: Conference Proceeding Book
Language:English
Published: New York, N.Y. : American Institute of Chemical Engineers, [1987]
Subjects:

MARC

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111 2 |a International Conference on Processing of Electronic Materials  |n (1st :  |d 1987 :  |c Santa Barbara, Cal) 
245 1 0 |a Processing of electronic materials :  |b proceedings of the First International Conference held at Santa Barbara, California, USA, February 23-28, 1987 /  |c editors, Clarence G. Law, Jr. and Richard Pollard ; sponsored by Engineering Foundation. 
264 1 |a New York, N.Y. :  |b American Institute of Chemical Engineers,  |c [1987] 
264 4 |c ©1987 
300 |a ix, 478 pages :  |b illustrations ;  |c 24 cm. 
336 |a text  |b txt  |2 rdacontent 
337 |a unmediated  |b n  |2 rdamedia 
338 |a volume  |b nc  |2 rdacarrier 
504 |a Includes bibliographical references and index. 
536 |a Supported by the National Science Foundation.  |c ECS-8513719 
650 0 |a Manufacturing processes  |v Congresses. 
650 0 |a Semiconductors  |v Congresses. 
650 0 |a Thin films  |v Congresses. 
650 0 |a Electronic industries  |v Congresses. 
700 1 |a Law, Clarence G. 
700 1 |a Pollard, Richard. 
710 2 |a Engineering Foundation (U.S.) 
710 2 |a National Science Foundation (U.S.) 
999 |a MARS 
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