Cover Image

Processing of electronic materials : proceedings of the First International Conference held at Santa Barbara, California, USA, February 23-28, 1987 /

Bibliographic Details
Corporate Authors: International Conference on Processing of Electronic Materials Santa Barbara, Cal, Engineering Foundation (U.S.), National Science Foundation (U.S.)
Other Authors: Law, Clarence G., Pollard, Richard
Format: Conference Proceeding Book
Language:English
Published: New York, N.Y. : American Institute of Chemical Engineers, [1987]
Subjects:
Manufacturing processes > Congresses.
Semiconductors > Congresses.
Thin films > Congresses.
Electronic industries > Congresses.
Description
Physical Description:ix, 478 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0816904278