| Tag |
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Second Indicator |
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| LEADER |
00000cam a2200000 a 4500 |
| 001 |
in00000034224 |
| 005 |
20151007055238.0 |
| 008 |
870317s1987 paua b 10100 eng |
| 010 |
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|a 87007749
|
| 020 |
|
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|a 0931837421
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| 035 |
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|a (OCoLC)15488001
|
| 035 |
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|9 AAB7684AM
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| 040 |
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|a DLC
|c DLC
|d m/c
|d TXA
|d UtOrBLW
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| 049 |
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|a TXAM
|c [A10909520]
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| 050 |
0 |
0 |
|a TK7874
|b .S33 1987
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| 082 |
0 |
|
|a 621.381/73
|2 19
|
| 245 |
0 |
0 |
|a Science and technology of microfabrication :
|b symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. /
|c editors, R.E. Howard [and others].
|
| 264 |
|
1 |
|a Pittsburgh, Pa. :
|b Materials Research Society,
|c [1987]
|
| 264 |
|
4 |
|c ©1987
|
| 300 |
|
|
|a xvii, 373 pages :
|b illustrations ;
|c 24 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
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|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Materials Research Society symposia proceedings,
|x 0272-9172 ;
|v v. 76
|
| 500 |
|
|
|a Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting.
|
| 504 |
|
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|a Includes bibliographies and indexes.
|
| 650 |
|
0 |
|a Integrated circuits
|x Very large scale integration
|x Design and construction
|v Congresses.
|
| 700 |
1 |
|
|a Howard, R. E.
|q (Richard Edwin),
|d 1948-
|
| 711 |
2 |
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|a Symposium on the Science and Technology of Microfabrication
|d (1986 :
|c Boston, Mass.)
|
| 710 |
2 |
|
|a Materials Research Society.
|b Fall Meeting
|d (1986 :
|c Boston, Mass.)
|
| 830 |
|
0 |
|a Materials Research Society symposia proceedings ;
|v v. 76.
|
| 999 |
|
|
|a MARS
|
| 999 |
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| 952 |
f |
f |
|p ric
|a Texas A&M University
|b Rellis Campus
|c Joint Library Facility
|d Remote Storage
|t 0
|e TK7874 .S33 1987
|h Library of Congress classification
|i unmediated -- volume
|m A14810909520
|
| 998 |
f |
f |
|a TK7874 .S33 1987
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