Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Authors: Symposium on the Science and Technology of Microfabrication, Materials Research Society. Fall Meeting
Other Authors: Howard, R. E. (Richard Edwin), 1948-
Format: Conference Proceeding Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1987]
Series:Materials Research Society symposia proceedings ; v. 76.
Subjects:

MARC

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245 0 0 |a Science and technology of microfabrication :  |b symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. /  |c editors, R.E. Howard [and others]. 
264 1 |a Pittsburgh, Pa. :  |b Materials Research Society,  |c [1987] 
264 4 |c ©1987 
300 |a xvii, 373 pages :  |b illustrations ;  |c 24 cm. 
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490 1 |a Materials Research Society symposia proceedings,  |x 0272-9172 ;  |v v. 76 
500 |a Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting. 
504 |a Includes bibliographies and indexes. 
650 0 |a Integrated circuits  |x Very large scale integration  |x Design and construction  |v Congresses. 
700 1 |a Howard, R. E.  |q (Richard Edwin),  |d 1948- 
711 2 |a Symposium on the Science and Technology of Microfabrication  |d (1986 :  |c Boston, Mass.) 
710 2 |a Materials Research Society.  |b Fall Meeting  |d (1986 :  |c Boston, Mass.) 
830 0 |a Materials Research Society symposia proceedings ;  |v v. 76. 
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