Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Authors:	Symposium on the Science and Technology of Microfabrication, Materials Research Society. Fall Meeting
Other Authors:	Howard, R. E. (Richard Edwin), 1948-
Format:	Conference Proceeding Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1987]
Series:	Materials Research Society symposia proceedings ; v. 76.
Subjects:	Integrated circuits > Very large scale integration > Design and construction > Congresses.

Description
Item Description:	Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting.
Physical Description:	xvii, 373 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographies and indexes.
ISBN:	0931837421
ISSN:	0272-9172 ;