Optical metrology : coherent and incoherent optics for metrology, sensing and control in science, industry, and biomedicine /
| Corporate Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Dordrecht ; Boston :
M. Nijhoff ;
1987.
|
| Series: | NATO ASI series. Applied sciences ;
no. 131. |
| Subjects: |