Polycrystalline silicon for integrated circuit applications /
| Main Author: | Kamins, Theodore I. |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boston :
Kluwer Academic Publishers,
[1988]
|
| Series: | Kluwer international series in engineering and computer science ;
SECS 45. Kluwer international series in engineering and computer science. VLSI, computer architecture, and digital signal processing. |
| Subjects: |
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