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Polycrystalline silicon for integrated circuit applications /

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Bibliographic Details
Main Author: Kamins, Theodore I.
Format: Book
Language:English
Published: Boston : Kluwer Academic Publishers, [1988]
Series:Kluwer international series in engineering and computer science ; SECS 45.
Kluwer international series in engineering and computer science. VLSI, computer architecture, and digital signal processing.
Subjects:
Integrated circuits > Materials.
Silicon > Electric properties.
Description
Item Description:Includes index.
Physical Description:xii, 290 pages : illustrations ; 24 cm.
Bibliography:Bibliography: pages 249-280.
ISBN:0898382599