http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
1987 Symposium on VLSI Technology, May 18-21, 1987, Karuizawa
Symposium on VLSI Technology 1987 : Karuizawa, Japan)
Institute of Electrical and Electronics Engineers
Business Center for Academic Societies Japan
IEEE Service Center Single Publication Sales Unit [distributor]
[sponsored by] the IEEE Electron Devices Society [and] the Japan Society of Applied Physics.
Includes bibliographical references and index.