rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Digest of technical papers
    sub title: 1987 Symposium on VLSI Technology, May 18-21, 1987, Karuizawa
  title info:
    title: 1987 symposium on VLSI technology
  name:
    name part: Symposium on VLSI Technology 1987 : Karuizawa, Japan)
    role:
      role term: creator
  name:
    name part: IEEE Electron Devices Society
  name:
    name part: Ōyō Butsuri Gakkai
  name:
    name part: Institute of Electrical and Electronics Engineers
  type of resource: text
  genre: bibliography
  genre: conference publication
  genre: Conference papers and proceedings.
  origin info:
    place:
      place term: ja
    place:
      place term: Tokyo, Japan
    place:
      place term: Piscataway, NJ
    publisher: Business Center for Academic Societies Japan
    publisher: IEEE Service Center Single Publication Sales Unit [distributor]
    date issued: ©1987
    date issued: 1987
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: 113 pages : illustrations ; 28 cm
  note: [sponsored by] the IEEE Electron Devices Society [and] the Japan Society of Applied Physics.
  note: Includes bibliographical references and index.
  subject:
    topic: Integrated circuits
    topic: Very large scale integration
    genre: Congresses
  subject:
    topic: Circuits intégrés à très grande échelle
    genre: Congrès
  subject:
    topic: Integrated circuits
    topic: Very large scale integration
  classification: TK7874 .S94 1987
  classification: 621.38173
  record info:
    record content source: NAL
    record creation date: 871130
    record change date: 20230718113507.0
    record identifier: in00000027060
    language of cataloging:
      language term: eng