A laser triggered vacuum spark x-ray lithography source /

Bibliographic Details
Main Author: Keating, Richard Allen
Format: Thesis eBook
Language:English
Published: [Place of publication not identified] : [publisher not identified] ; 1987.
Subjects:
Online Access:Link to OAKTrust copy

MARC

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035 |a (OCoLC)18219245 
040 |a TXA  |c TXA  |d UtOrBLW 
049 |a TXAZ [Also in] [Archives]  |c 1 [A10994737], 2 [A10994779] 
099 |a 1987  |a Thesis  |a K25 
100 1 |a Keating, Richard Allen. 
245 1 2 |a A laser triggered vacuum spark x-ray lithography source /  |c by Richard Allen Keating. 
264 1 |a [Place of publication not identified] :  |b [publisher not identified] ;  |c 1987. 
300 |a vii, 55 leaves :  |b illustrations ;  |c 29 cm. 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
500 |a "Major subject: Physics." 
500 |a Typescript (photocopy). 
500 |a Vita. 
502 |b M.S.  |c Texas A&M University  |d 1987. 
504 |a Bibliography: leaf 54. 
530 |a Also available online. 
650 0 |a X-ray lithography. 
650 0 |a X-ray lithography  |x Equipment and supplies  |x Testing. 
650 4 |a Major physics. 
856 4 1 |u https://hdl.handle.net/1969.1/ETD-TAMU-1987-THESIS-K25  |z Link to OAKTrust copy  |t 0 
999 |a MARS 
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952 f f |p noncirc  |a Texas A&M University  |b J.J. Pickle Campus  |c High Density Repository  |s HDR  |d Remote Storage  |t 0  |e 1987 Thesis K25  |h Other scheme  |i computer -- online resource  |m A14839626733 
952 f f |a Texas A&M University  |b College Station  |c Electronic Resources  |s www_evans  |d Available Online  |t 0  |e 1987 Thesis K25  |h Other scheme 
998 f f |a 1987 Thesis K25  |t 0  |l Available Online 
998 f f |a 1987 Thesis K25  |t 0  |l Remote Storage