Cover Image

A laser triggered vacuum spark x-ray lithography source /

Bibliographic Details
Main Author: Keating, Richard Allen
Format: Thesis eBook
Language:English
Published: [Place of publication not identified] : [publisher not identified] ; 1987.
Subjects:
X-ray lithography.
X-ray lithography > Equipment and supplies > Testing.
Major physics.
Online Access:Link to OAKTrust copy
Description
Item Description:"Major subject: Physics."
Typescript (photocopy).
Vita.
Physical Description:vii, 55 leaves : illustrations ; 29 cm.
Also available online.
Bibliography:Bibliography: leaf 54.