Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators /

Bibliographic Details
Main Author: Boyd, Ian W., 1958-
Format: Book
Language:English
Published: Berlin ; New York : Springer-Verlag, [1987]
Series:Springer series in materials science ; 3.
Subjects:

MARC

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050 0 0 |a TA1677  |b .B69 1987 
082 0 |a 621.36/6  |2 19 
100 1 |a Boyd, Ian W.,  |d 1958- 
245 1 0 |a Laser processing of thin films and microstructures :  |b oxidation, deposition, and etching of insulators /  |c Ian W. Boyd. 
264 1 |a Berlin ;  |a New York :  |b Springer-Verlag,  |c [1987] 
264 4 |c ©1987 
300 |a viii, 320 pages :  |b 77 illustrations ;  |c 24 cm. 
336 |a text  |b txt  |2 rdacontent 
337 |a unmediated  |b n  |2 rdamedia 
338 |a volume  |b nc  |2 rdacarrier 
490 1 |a Springer series in materials science ;  |v 3 
504 |a Bibliography: pages 287-313. 
500 |a Includes index. 
650 0 |a Lasers  |x Industrial applications. 
830 0 |a Springer series in materials science ;  |v 3. 
999 |a MARS 
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952 f f |p normal  |a Texas A&M University  |b College Station  |c Sterling C. Evans Library  |d Evans: Library Stacks  |t 0  |e TA1677 .B69 1987  |h Library of Congress classification  |i unmediated -- volume  |m A14811084789 
998 f f |a TA1677 .B69 1987  |t 0  |l Evans: Library Stacks