Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators /
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin ; New York :
Springer-Verlag,
[1987]
|
| Series: | Springer series in materials science ;
3. |
| Subjects: |
| Item Description: | Includes index. |
|---|---|
| Physical Description: | viii, 320 pages : 77 illustrations ; 24 cm. |
| Bibliography: | Bibliography: pages 287-313. |
| ISBN: | 0387179518 (U.S.) |