Boyd, I. W. (1987). Laser processing of thin films and microstructures: Oxidation, deposition, and etching of insulators. Springer-Verlag.
Chicago Style (17th ed.) CitationBoyd, Ian W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition, and Etching of Insulators. Berlin ; New York: Springer-Verlag, 1987.
MLA (9th ed.) CitationBoyd, Ian W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition, and Etching of Insulators. Springer-Verlag, 1987.
Warning: These citations may not always be 100% accurate.